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Compensation of phase change on reflection in white-light interferometry for step height measurement

✍ Scribed by Park, Min-Cheol; Kim, Seung-Woo

Book ID: 115424588
Publisher: Optical Society of America
Year: 2001
Tongue: English
Weight: 95 KB
Volume: 26
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.26.000420

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