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Compatible CMOS RAMs

Publisher
Elsevier Science
Year
1977
Weight
181 KB
Volume
1
Category
Article
ISSN
0308-5953

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A front-cut infrared thermopile array with good CMOS compatibility is demonstrated in this paper. Properly arranged narrow windows in IR absorbing area of the thermopile are designed along the [1 0 0] direction on the (1 0 0) Si wafer. Our experiment shows that this infrared thermopile array has goo