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Compatibility of thin-film and semiconductor technology for monolithically integrated active sensors

✍ Scribed by K. Vernie; H. Rudolph; D. Seitzer

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 694 KB
Volume: 27
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(91)87068-e

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