Comparisons between SiO2 and a-Si as a protection layer on the surface of VSi for preventing oxygen diffusion through the V film

✍ Scribed by Jiann-Ruey Chen; Ming-Feng Tseng

• Book ID: 118986931
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 544 KB
• Volume: 178
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(86)90280-3