Comparison of unbalanced magnetron sputtering and filtered arc evaporation for the preparation of films onto insulating substrates

✍ Scribed by N Mustapha; RP Howson

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 708 KB
• Volume: 49
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(97)00011-0