Comparison of Two Alternative Silicon-on-Glass Microfabrication Processes for MEMS Inertial Sensors

✍ Scribed by M.M. Torunbalci; E. Tatar; S.E. Alper; T. Akin

• Book ID: 119355692
• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 463 KB
• Volume: 25
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2011.12.221