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Comparison of the electrical and optical properties of direct current and radio frequency sputtered amorphous indium gallium zinc oxide films

✍ Scribed by Yao, Jianke; Gong, Li; Xie, Lei; Zhang, Shengdong

Book ID: 122735851
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 549 KB
Volume: 527
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.12.035

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