Comparison of Thai's theory with experimental boron doping profiles in silicon, diffused from boron nitride sources

✍ Scribed by K.P. Frohmader; L. Baumbauer

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 223 KB
• Volume: 23
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(80)90122-7