Comparison of Thai's theory with experimental boron doping profiles in silicon, diffused from boron nitride sources: K. P. Frohmader and L. Baumbauer. Solid-St. Electron. 23, 1263 (1980)

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 115 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(81)90474-1