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Comparison of Thai's theory with experimental boron doping profiles in silicon, diffused from boron nitride sources: K. P. Frohmader and L. Baumbauer. Solid-St. Electron. 23, 1263 (1980)


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
115 KB
Volume
21
Category
Article
ISSN
0026-2714

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