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Comparison of tensile and bulge tests for thin-film silicon nitride

✍ Scribed by R. L. Edwards; G. Coles; W. N. Sharpe

Book ID: 105569940
Publisher: Sage Publications
Year: 2004
Tongue: English
Weight: 762 KB
Volume: 44
Category: Article
ISSN: 0014-4851
DOI: 10.1007/bf02427976

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