Comparison of secondary ion intensity enhancement from polymers on silicon and silver substrates by using Au-TOF-SIMS

✍ Scribed by M. Kudo; K. Aimoto; Y. Sunagawa; N. Kato; S. Aoyagi; S. Iida; N. Sanada

• Book ID: 108060587
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 398 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.05.021