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Comparison of near-interface traps in Al[sub 2]O[sub 3]â4H-SiC and Al[sub 2]O[sub 3]âSiO[sub 2]â4H-SiC structures

✍ Scribed by Avice, Marc; Grossner, Ulrike; Pintilie, Ioana; Svensson, Bengt G.; Nilsen, Ola; Fjellvag, Helmer

Book ID: 121512845
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 256 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2387978

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Comparison of near-interface traps in Al[sub 2]O[sub 3]â4H-SiC and Al[sub 2]O[sub 3]âSiO[sub 2]â4H-SiC structures

Comparison of near-interface traps in Al[sub 2]O[sub 3]â4H-SiC and Al[sub 2]O[sub 3]âSiO[sub 2]â4H-SiC structures