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Comparison of mobility-limiting mechanisms in high-mobility Si1−xGex heterostructures

✍ Scribed by Monroe, Don


Book ID
121283736
Publisher
AVS (American Vacuum Society)
Year
1993
Tongue
English
Weight
878 KB
Volume
11
Category
Article
ISSN
0734-211X

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Annealing effects on mobility-limiting m
✍ T. Ueno; A. Yutani; Y. Shiraki; K. Nakagawa 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 68 KB

The changes in the mobility and carrier concentration in annealed modulation doping Si/Si 0.8 Ge 0.2 heterostructures with various channel thicknesses have been studied and mobility-limiting mechanisms were clarified. The dominant scattering mechanism was found to change to scattering due to uniform