Comparison of laser-wavelength operation for drilling of via holes in AlGaN/GaN HEMTs on SiC substrates

✍ Scribed by T. J. Anderson; F. Ren; L. Covert; J. Lin; S. J. Pearton; T. W. Dalrymple; C. Bozada; R. C. Fitch; N. Moser; R. G. Bedford; M. Schimpf

• Book ID: 107453629
• Publisher: Springer US
• Year: 2006
• Tongue: English
• Weight: 305 KB
• Volume: 35
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-006-0119-8