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Comparison of in situ optical reflectance and post-growth characterisation for quantitative composition and thickness determination of AlxGa1-xAs

✍ Scribed by R. Jothilingam; T. Farrell; T.B. Joyce; T.J. Bullough; P.J. Goodhew

Book ID
108390503
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
93 KB
Volume
53
Category
Article
ISSN
0042-207X

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## Abstract This paper reports on the in situ determination of the Al‐content in Al~__x__~ Ga~1–__x__~ N layers deposited by MOVPE on sapphire and silicon substrates by means of optical reflectance. The accuracy of the conventional in situ method which utilizes the dependence of the refractive inde