Comparison of experimental target currents with analytical model results for plasma immersion ion implantation

✍ Scribed by En, W.G.; Lieberman, M.A.; Cheung, N.W.

• Book ID: 117862546
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 673 KB
• Volume: 23
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.402334