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Comparison of CH4/H2 and C2H6/H2 inductively coupled plasma etching of ZnO

✍ Scribed by Wantae Lim; Lars Voss; Rohit Khanna; B.P. Gila; D.P. Norton; S.J. Pearton; F. Ren

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 977 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.01.081

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