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Comparison of arsenic and phosphorus diffusion behavior in silicon–germanium alloys

✍ Scribed by S. Eguchi; J. L. Hoyt; C. W. Leitz; E. A. Fitzgerald


Book ID
121786744
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
297 KB
Volume
80
Category
Article
ISSN
0003-6951

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