Comparison of 4H Silicon Carbide Epitaxial Growths at Various Growth Pressures Using Dicholorosilane and Silane Gases

✍ Scribed by Rana, Tawhid; Song, Hai Zheng; Chandrashekhar, M.V.S.; Sudarshan, Tangali S.

• Book ID: 121532490
• Publisher: Trans Tech Publications, Ltd.
• Year: 2012
• Tongue: English
• Weight: 954 KB
• Volume: 717-720
• Category: Article
• ISSN: 1662-9752
• DOI: 10.4028/www.scientific.net/MSF.717-720.117