Comparison between the SIMS and MEIS techniques for the characterization of ultra shallow arsenic implants

✍ Scribed by D. Giubertoni; M. Bersani; M. Barozzi; S. Pederzoli; E. Iacob; J.A. van den Berg; M. Werner

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 132 KB
• Volume: 252
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.02.137