✦ LIBER ✦
A comparison between Sb and As implantation for the formation of highly conducting shallow silicon layers: N D Young, J appl Phys, 62, 1987, 3441–3443
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 149 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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