Comparison between monomethyl hydrazine and ECR plasma activated nitrogen as a nitrogen source for CBE growth of GaN

✍ Scribed by S Yonemura; T Yaguchi; H Tsuchiya; N Shimoyama; T Suemasu; F Hasegawa

• Book ID: 108342651
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 217 KB
• Volume: 188
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(98)00078-5