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A comparison of NF3 and NH3 as the nitrogen sources for AIN crystal growth by metalorganic chemical vapor deposition

✍ Scribed by J.H. Edgar; Z.J. Yu; B.S. Sywe


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
547 KB
Volume
204
Category
Article
ISSN
0040-6090

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