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Comparison between electron beam evaporation and high rate sputtering with a plasmatron

✍ Scribed by S. Schiller; U. Heisig; K. Goedicke; G. Jaesch


Book ID
107862393
Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
44 KB
Volume
45
Category
Article
ISSN
0040-6090

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