✦ LIBER ✦
3811. Electron beam evaporation and high-sputtering with plasmatron/magnetron systems—a comparison. Part I. Germany: S Schiller et al, Vakuum-Tech, 27 (2), 1978, 51–55
- Book ID
- 114092858
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 149 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
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