✦ LIBER ✦

Comparison and combination of several stress relief methods for cubic boron nitride films deposited by ion beam assisted deposition

✍ Scribed by Y.M. Fan; X.W. Zhang; J.B. You; H.R. Tan; N.F. Chen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of cubic boron nitride

✍ H. Wituschek; H. Stopka-Ebler; G.K. Wolf 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 435 KB

Interfacial structure control of cubic b

✍ Y. Setsuhara; T. Suzuki; Y. Tanaka; S. Miyake; M. Suzuki; M. Kumagai; K. Ogata; 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 590 KB

In situ stress analysis of boron nitride

✍ M Zeitler; S Sienz; H Neumann; M Zeuner; J.W Gerlach; B Rauschenbach 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 123 KB

Fundamental research on the deposition o

✍ M. Sueda; T. Kobayashi; H. Tsukamoto; T. Rokkaku; S. Morimoto; Y. Fukaya; N. Yam 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 632 KB

Method for Simulating the Thickness Dist

✍ T. Kobayashi; R. Valizadeh; J.S. Colligon; H. Kanematsu; K. Morisato 📂 Article 📅 2012 🏛 Elsevier 🌐 English ⚖ 836 KB

The effect of adding gas ions to a beam

✍ Andoh Yasunori; Nishiyama Satoshi; Kirimura Hiroya; Mikami Takashi; Ogata Kiyosh 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 376 KB