Comparative study on electron transport in glow discharge a-Si:H films prepared from mono- and disilane gases

✍ Scribed by R. Hattori; K. Shirakawa; J. Shirafuji

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 327 KB
• Volume: 62
• Category: Article
• ISSN: 0038-1098
• DOI: 10.1016/0038-1098(87)90208-0