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Comparative study of the properties of ultrathin Si3N4 films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy

โœ Scribed by Paloura, E. C.; Logothetidis, S.; Boultadakis, S.; Ves, S.

Book ID
120078791
Publisher
American Institute of Physics
Year
1991
Tongue
English
Weight
722 KB
Volume
59
Category
Article
ISSN
0003-6951

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