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Comparative study of negative cluster emission in sputtering of Si, Ge and their oxides

✍ Scribed by M. Perego; S. Ferrari; M. Fanciulli

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 220 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.02.155

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