Comparative Study of Defects in 4H-SiC Epilayers Grown on 4o Off-Axis (0001) and (000-1) Substrates

✍ Scribed by Aigo, Takashi; Itoh, Wataru; Fujimoto, Tatsuo; Yano, Takayuki

• Book ID: 127258166
• Publisher: Trans Tech Publications, Ltd.
• Year: 2014
• Tongue: English
• Weight: 1023 KB
• Volume: 778-780
• Category: Article
• ISSN: 1662-9752
• DOI: 10.4028/www.scientific.net/msf.778-780.143