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Comparative study of c-axis AlN films sputtered on metallic surfaces

✍ Scribed by Sanz-Hervás, A.; Vergara, L.; Olivares, J.; Iborra, E.; Morilla, Y.; García-López, J.; Clement, M.; Sangrador, J.; Respaldiza, M.A.

Book ID
123413991
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
248 KB
Volume
14
Category
Article
ISSN
0925-9635

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