Comparative studies of SIMS and SNMS analyses during the build up of sputter equilibrium under oxygen and rare gas ion bombardment

✍ Scribed by U. Breuer; H. Holzbrecher; M. Gastel; J. S. Becker; H.-J. Dietze

• Book ID: 105896689
• Publisher: Springer
• Year: 1997
• Tongue: English
• Weight: 216 KB
• Volume: 358
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s002160050342