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Comparative studies of parameters calibration for focused ion beam deposition

✍ Scribed by Jong-Hyeong Kim; Sang Youp Synn; Joon Hyun Kim

Book ID: 107662294
Publisher: Korean Society for Precision Engineering
Year: 2010
Tongue: English
Weight: 562 KB
Volume: 11
Category: Article
ISSN: 1229-8557
DOI: 10.1007/s12541-010-0089-x

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