✦ LIBER ✦
Investigation of Submicron Linewidth Direct Deposition for High-Density IC Chip Modification by Focused Ion Beam
✍ Scribed by Y.Q. Fu; N.K.A. Bryan; O.N. Shing
- Book ID
- 105854770
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 203 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0268-3768
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