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Comparative physical and electrical metrology of ultrathin oxides in the 6 to 1.5 nm regime

✍ Scribed by Ahmed, K.; Ibok, E.; Bains, G.; Chi, D.; Ogle, B.; Wortman, J.J.; Hauser, J.R.


Book ID
114538202
Publisher
IEEE
Year
2000
Tongue
English
Weight
107 KB
Volume
47
Category
Article
ISSN
0018-9383

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