𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Comparative measurements of acceptor concentration at the growth and nucleation side of microwave plasma CVD polycrystalline diamond films

✍ Scribed by Ralchenko, V.G.; Pleskov, Y.V.; Polyakov, V.I.; Khomich, A.V.; Evstefeeva, Y.E.; Krotova, M.D.; Loubnin, E.N.; Vlasov, I.I.


Book ID
122094396
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
120 KB
Volume
12
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Growth of nanocrystalline diamond films
✍ Potocky, S. ;Kromka, A. ;Potmesil, J. ;Remes, Z. ;Polackova, Z. ;Vanecek, M. πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 346 KB

## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea