Comparative Analysis of Scanning Electron Microscopy Techniques for Semiconductors: Electron-Beam-Induced Potential Method, Single-Contact Electron-Beam-Induced Current Method, and Thermoacoustic Detection

✍ Scribed by E. I. Rau; A. V. Gostev; Zhu Shiqiu; D. Phang; D. Chan; D. Thong; W. Wong

• Book ID: 110300157
• Publisher: Springer
• Year: 2001
• Tongue: English
• Weight: 257 KB
• Volume: 30
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1023/a:1011336726819