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Compaction-limited system lifetime in 193-nm optical lithography

✍ Scribed by Richard Schenker; William Oldham

Book ID: 114155757
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 285 KB
Volume: 41-42
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00031-8

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