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Compact UHV system for fabrication and in situ analysis of electron beam deposited structures using a focused low energy electron beam

โœ Scribed by Kakefuda, Y.; Yamashita, Y.; Mukai, K.; Yoshinobu, J.


Book ID
121810405
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
576 KB
Volume
77
Category
Article
ISSN
0034-6748

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