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Compact ECR-source of ions and radicals for semiconductor surface treatment

✍ Scribed by S.Yu. Shapoval; P.V. Bulkin; A.A. Chumakov; S.A. Khudobin; I. Maximov; G.M. Mikhailov

Book ID: 103471640
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 211 KB
Volume: 43
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(92)90260-4

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