Multipurpose 14.5 GHz ECR ion source: Special features and application for surface modification

✍ Scribed by S. Kökényesi; I. Iván; E. Takács; J. Pálinkás; S. Biri; A. Valek

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 170 KB
• Volume: 233
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.03.110