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Compact 13.5-nm free-electron laser for extreme ultraviolet lithography

✍ Scribed by Socol, Y.; Kulipanov, G. N.; Matveenko, A. N.; Shevchenko, O. A.; Vinokurov, N. A.

Book ID: 120293753
Publisher: The American Physical Society
Year: 2011
Tongue: English
Weight: 309 KB
Volume: 14
Category: Article
ISSN: 1098-4402
DOI: 10.1103/PhysRevSTAB.14.040702

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