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Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits

✍ Scribed by Robert Heiland; Alan Leslie

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 487 KB
Volume: 24
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90054-x

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