Combined application of spreading-resistance and electron-microprobe depth profiling on GaAs:Zn and Si:P

✍ Scribed by H.-G. Hettwer; W. Lerch; B. Lentfort; N.A. Stolwijk; H. Mehrer

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 350 KB
• Volume: 50
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(91)90220-e