Effect of collision cascade density on r
✍
A.Yu. Azarov; A.I. Titov; P.A. Karaseov; A. Hallén
📂
Article
📅
2009
🏛
Elsevier Science
🌐
English
⚖ 409 KB
The damage accumulation in 6H-SiC bombarded at room temperature with 1.3 keV/amu atomic P + ions and small cluster ions PF þ n (n = 2 and 4) have been studied by Rutherford backscattering spectrometry in channeling mode. Results show that collision cascade density strongly affects damage buildup in