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Codoped (AlN) and monodoped (Al) ZnO thin films grown by RF sputtering: A comparative study

✍ Scribed by K.P. Bhuvana; J. Elanchezhiyan; N. Gopalakrishnan; T. Balasubramanian


Book ID
108063680
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
634 KB
Volume
255
Category
Article
ISSN
0169-4332

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Indium molybdenum oxide thin films: A co
✍ Elangovan, E. ;Martins, R. ;Fortunato, E. πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 296 KB

## Abstract Indium molybdenum oxide thin films were deposited using different radio‐frequency sputtering units on glass substrates at room temperature from an In~2~O~3~ (95 wt.%): Mo (5 wt.%) target. The film thickness ranges between 160 and 275 nm. The chamber volume of Unit‐1 was ∼2.4 times large