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Coating with silicon carbide in high-frequency discharge

✍ Scribed by V. A. Lavrenko; A. A. Chekhovskii; A. P. Pomytkin; L. V. Strashinskaya


Book ID
104941665
Publisher
Springer
Year
1986
Tongue
English
Weight
449 KB
Volume
25
Category
Article
ISSN
1573-9066

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Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH, and CH, gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission e