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Silicon carbide nanoparticles for advanced materials produced in radio frequency modulated glow discharges

✍ Scribed by G Viera; SN Sharma; J Costa; RQ Zhang; JL Andújar; E Bertran

Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
399 KB
Volume
48
Category
Article
ISSN
0042-207X

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✦ Synopsis

Nanometric powder of silicon carbide has been produced in a radiofrequency square wave-modulated glow discharge of SiH, and CH, gases. The transient behavior observed in the power absorbed during the discharge has been related to the various steps of the formation of particles. At the transmission electron microscope, two populations of particles were found: around 70 and 300nm. Electron diffraction patterns showed that the particles were amorphous although the short-range order was similar to that of /?-Sic micrometric powder. The atomic concentrations of Si, C and H were determined by elemental analysis. The chemical composition was determined by X-ray photoelectron spectroscopy. The polymeric character of the powder was evident from the presence of CH, and CH, species as indicated by RAMAN and FTIR spectroscopies.

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