β Scribed by Dr. D. Lange, Dr. O. Brand, Professor Dr. H. Baltes (auth.)
No coin nor oath required. For personal study only.
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.
Front Matter....Pages I-VIII
Introduction....Pages 1-5
Design Considerations....Pages 7-29
Cantilever Beam Resonators....Pages 31-56
Resonant Gas Sensor....Pages 57-83
Force Sensors for Parallel Scanning Atomic Force Microscopy....Pages 85-120
Conclusions and Outlook....Pages 121-124
Back Matter....Pages 125-143
Nanotechnology;Control, Robotics, Mechatronics;Engineering, general;Measurement Science and Instrumentation
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