CMOS 45-nm 3D metal-oxide-metal capacitors for millimeter wave applications

✍ Scribed by Thomas Quémerais; Laurence Moquillon; Philippe Benech; Jean-Michel Fournier; Sébastien Pruvost

• Book ID: 102951981
• Publisher: John Wiley and Sons
• Year: 2011
• Tongue: English
• Weight: 798 KB
• Volume: 53
• Category: Article
• ISSN: 0895-2477
• DOI: 10.1002/mop.26029

✦ Synopsis

Abstract

Novel 3D metal‐oxide‐metal capacitors for 60 GHz applications in a CMOS 45 nm process are proposed. Relatively high capacitances density of 3 fF/μm^2^ and quality factors from 3.2 to 10.2 at 60 GHz are measured. The study is validated up to 110 GHz for different capacitance values. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26029